this post was submitted on 23 Dec 2023
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Firm predicts it will cost $28 billion to build a 2nm fab and $30,000 per wafer, a 50 percent increase in chipmaking costs as complexity rises::As wafer fab tools are getting more expensive, so do fabs and, ultimately, chips. A new report claims that

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[–] Ludrol@szmer.info 15 points 10 months ago* (last edited 10 months ago)

Depending on how in-depth you want to delve into this.
Newsletter semianalysis.com
Youtube Asianometry
Wikipedia
Some litography university textbooks. Sadly I don't know which ones.